Fabrication of SiO:CH Particle-agglomerated Films by PECVD with Vinyl-group Organosilicon Reactants
نویسندگان
چکیده
Particle-agglomerated films exhibit rough surfaces, which can be suitable for realization of ultra hydrophobicity. We fabricated particles and their deposits silica with organic functional groups (SiO:CH) by plasma polymerization organosilicon reactants including methyl vinyl groups. The trimethyl(vinyl)silane reactant showed a uniform deposition the plasma-polymerized SiO:CH in large area, while trimethyl (vinyloxy)silane exhibited localized particle deposition.
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ژورنال
عنوان ژورنال: Journal of Photopolymer Science and Technology
سال: 2022
ISSN: ['0914-9244', '1349-6336']
DOI: https://doi.org/10.2494/photopolymer.35.283